Article_e44ce205 07a5 5df6 af45 6865f8f9891c.

Aug 22, 2011 · Indeed when etching D263 and AF45 glass in SF 6 plasma, we observe a threshold at 70 eV. 48 Parameter A is estimated from SiO 2 for the Si site and from each glass for the M site. This determination is made for only one plasma condition ( P rf = 1500 W, p = 10 mTorr, V dc = 200 V, Q (SF 6 ) = 40 sccm) by comparing the simulated etch rate to the ...

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